System integration of automated production solution for industrial enterprises
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Equipment feature5856.com
Productivity : ≥ 4000 wafers / hour
Flexible On / offloading
(Stack M / Z , Cassette M / Z or other customized box)
In thickness : 150 μm above
In type : Mono & Multi crystal
In size : 5 " (125x125) , 6 " (156x156)
Double Wafer check (option)
Manual or auto magazine loading
Real time PC Based control

Wafer sorting System Wafer sorting System