Equipment Feature
　　Productivity : ≥ 4000 wafers / hour
　　Wafer breakage : ＜ 0.1 %
　　Flexible On / offloading
　　(Stack M / Z Cassette M / Z or other customized box)
　　In thickness : 150 μm above
　　In type : Mono & Multi crystal
　　In size : 5 " (125x125) , 6 " (156x156)
　　Double Wafer check (option)
　　Manual or auto magazine loading
　　Real time PC Based control